Silicon photonics XRD Grazing incidence X-ray diffraction Photovoltaic Copper Hybrid materials Thin films Pulvérisation magnétron radiofréquence Oxide materials MoS2 Computational electromagnetic methods M-lines Citric acid RF magnetron sputtering Nanoparticles Sputtering Rare earth Erbium Electroluminescence Nanostructures Hafnium silicates ADE-FDTD Oxide interface AFM Microstructure physique Oxides Oxygen vacancies Nanostructuring Conductivity Waveguide Cerium CO adsorption Optical amplifiers Rare-earth Feature erasure Friction Quantum-well Films Couches minces Nanostructure Liposomes Terres rares Si-rich silicon oxide Couches minces semi-conductrices Down-conversion Laser pyrolysis Silicon nanoclusters Pulvérisation cathodique Rare-earth ions IR spectroscopy Cathodoluminescence Fluorescence Energy transfer Raman scattering Waveguides Atom probe tomography Microstructure physics Nanostructured materials Epitaxy FTIR Semiconductors Phase transition Nanoparticules Infrared absorption Si nanocluster Thin film Luminescence Magnetron sputtering Irradiation Silicon GENOMIQUE HR STEM-HAADF Silicium Radiofrequency magnetron sputtering Lifetime Neodymium Silicon nanocrystals Structural properties Photoluminescence PZT Refractive index Hafnium silicate Silicon nitride CoMoS Crystal structure Guide d'onde Reactive magnetron sputtering Raman Matériaux hybrides Optical properties SiC Microstructure Hillocks Electron paramagnetic resonance Terbium Multilayers High-k dielectrics Doping Al2O3 Rare earths